INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "INTERFEROMETER SYSTEM WITHOUT WALK-OFF, METHOD FOR USING AN INTERFEROMETER SYSTEM"

GENEVA, Aug. 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/050544) for "INTERFEROMETER SYSTEM WITHOUT WALK-OFF, METHOD FOR USING AN INTERFEROMETER SYSTEM" on Jan 10, 2025. With publication no. WO/2025/168295, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KOENEN, Willem, Herman, Gertruda, Anna (P.O. Box 3245500 AH Veldhoven), ADRIAENS, Johannes, Mathias, Theodorus, Antonius (P.O. Box 3245500 AH Veldhoven)

Abstract: The present disclosure provides an interferometer s...