GENEVA, April 6 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/074772) for "HEIGHT MEASUREMENT SYSTEM" on Sep 05, 2024. With publication no. WO/2025/067839, the details related to the patent application was published on Apr 03, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHOLZ, Sandy, Claudia (P.O. Box 3245500 AH Veldhoven), SCHOLZ, Christian, Oliver (P.O. Box 3245500 AH Veldhoven)
Abstract:
A system for measuring the height of a resist-covered surface of a substrate, the system comprising a projection unit comprising at least one radi...