INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "HEAT TRANSFER SYSTEMS FOR AN EXTREME ULTRAVIOLET RADIATION UTILIZATION APPARATUS, METHODS OF MANUFACTURING THE SAME AND HEAT TRANSFER METHODS FOR AN EXTREME ULTRAVIOLET RADIATION UTILIZATION APPARATUS"

GENEVA, June 2 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/079542) for "HEAT TRANSFER SYSTEMS FOR AN EXTREME ULTRAVIOLET RADIATION UTILIZATION APPARATUS, METHODS OF MANUFACTURING THE SAME AND HEAT TRANSFER METHODS FOR AN EXTREME ULTRAVIOLET RADIATION UTILIZATION APPARATUS" on Oct 18, 2024. With publication no. WO/2025/108637, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TEDROW, Jon, David (17075 Thornmint CourtSan Diego, California CA 92127), MA, Yue (17075 Thornmint ...