GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/056171) for "FILM, FILM ASSEMBLY, AND LITHOGRAPHIC APPARATUS" on Mar 06, 2025. With publication no. WO/2025/201833, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VAN DE KERKHOF, Marcus, Adrianus (P.O. Box 3245500 AH Veldhoven)
Abstract: Disclosed herein is a film for a lithographic apparatus, the film comprising a plurality of nanotubes, wherein the plurality of nanotubes comprises silicon-based nanotubes for ...