GENEVA, Jan. 27 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/068843) for "EUV RADIATION ENERGY SENSOR" on Jul 04, 2024. With publication no. WO/2025/016737, the details related to the patent application was published on Jan 23, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LIANG, Lei (P.O. Box 3245500 AH Veldhoven), SHAN, Juan (P.O. Box 3245500 AH Veldhoven), GANG, Tian (P.O. Box 3245500 AH Veldhoven)
Abstract:
A sensor for measuring energy of EUV radiation from combined radiation comprising EUV radiation and non-EUV radiation, the sens...