INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "ELECTRON ENERGY FLUCTUATION STABILIZING AND COMPENSATING METHODS AND TECHNIQUES FOR ELECTRON-BEAM SYSTEMS"

GENEVA, July 14 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/050052) for "ELECTRON ENERGY FLUCTUATION STABILIZING AND COMPENSATING METHODS AND TECHNIQUES FOR ELECTRON-BEAM SYSTEMS" on Jan 02, 2025. With publication no. WO/2025/146461, the details related to the patent application was published on Jul 10, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LUO, Ying (80 W Tasman DriveSan Jose, California 95134), LIU, Zuliang (80 W Tasman DriveSan Jose, California 95134), SHARMA, Vineet (80 W Tasman DriveSan Jose, California 95134), HE, Xiaodong (...