INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "DIRECT EDGE PLACEMENT ERROR MEASUREMENT USING A HIGH VOLTAGE SCANNING CHARGED PARTICLE MICROSCOPE AND MACHINE LEARNING"

GENEVA, May 26 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/078864) for "DIRECT EDGE PLACEMENT ERROR MEASUREMENT USING A HIGH VOLTAGE SCANNING CHARGED PARTICLE MICROSCOPE AND MACHINE LEARNING" on Oct 14, 2024. With publication no. WO/2025/103678, the details related to the patent application was published on May 22, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): REN, Yan (P.O. Box 3245500 AH Veldhoven), BATISTAKIS, Chrysostomos (P.O. Box 3245500 AH Veldhoven), PISARENCO, Maxim (P.O. Box 3245500 AH Veldhoven), ZHOU, Cui (P.O. Box 3245500 AH ...