INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "DEFORMATION MEASUREMENT OF A CLAMPED OBJECT WITH AN INTEGRATED OPTICS NEAR-FIELD SENSOR"

GENEVA, Oct. 6 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/055427) for "DEFORMATION MEASUREMENT OF A CLAMPED OBJECT WITH AN INTEGRATED OPTICS NEAR-FIELD SENSOR" on Feb 27, 2025. With publication no. WO/2025/201791, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GUPTA, Ankush (77 Danbury RoadWilton, Connecticut 06897), JAHANI, Saman (77 Danbury RoadWilton, Connecticut 06897), GUEVARA TORRES, Raul, Andres (77 Danbury RoadWilton, Connecticut 06897), VAN T WESTEINDE, Maaike...