INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "DEFORMABLE MIRROR CONTROL FOR LITHOGRAPHIC APPARATUS"

GENEVA, Nov. 10 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/059505) for "DEFORMABLE MIRROR CONTROL FOR LITHOGRAPHIC APPARATUS" on Apr 07, 2025. With publication no. WO/2025/228629, the details related to the patent application was published on Nov 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DENG, Fan (77 Danbury RoadWilton, Connecticut 06897), CHEN, Zhenglin (77 Danbury RoadWilton, Connecticut 06897), JOOBEUR, Adel (77 Danbury RoadWilton, Connecticut 06897), DING, Fujian (77 Danbury RoadWilton, Connecticut 06897), RAUB, Alexander, K...