INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "COOLING METHOD AND APPARATUS OF SCANNING ELECTRON MICROSCOPE COLUMN"

GENEVA, April 28 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/078600) for "COOLING METHOD AND APPARATUS OF SCANNING ELECTRON MICROSCOPE COLUMN" on Oct 10, 2024. With publication no. WO/2025/082859, the details related to the patent application was published on Apr 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YU, Dongchi (80 W Tasman DriveSan Jose, California 95134), CHEN, Tianming (80 W Tasman DriveSan Jose, California 95134), LIU, Yu (80 W Tasman DriveSan Jose, California 95134), SUN, Zhuting (80 W Tasman DriveSan Jose, California 95...