INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CONTOUR-BASED FRAMEWORK FOR MONITORING AND EVALUATING PROCESS QUALITY AND VARIATION"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/083108) for "CONTOUR-BASED FRAMEWORK FOR MONITORING AND EVALUATING PROCESS QUALITY AND VARIATION" on Nov 21, 2024. With publication no. WO/2025/131528, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DU, Zijian (80 W Tasman DriveSan Jose, California 95134), PU, Lingling (80 W Tasman DriveSan Jose, California 95134), WANG, Bo (80 W Tasman DriveSan Jose, California 95134), YUAN, Rui (80 W Tasman DriveSan Jose, Cal...