GENEVA, July 29 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/086643) for "CLAMPING WITH A REMOVABLE MEMBRANE IN A LITHOGRAPHY APPARATUS" on Dec 16, 2024. With publication no. WO/2025/153278, the details related to the patent application was published on Jul 24, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MONKMAN, Eric, Justin (77 Danbury RoadWilton, Connecticut 06897), BURROUGHS, John, Robert (77 Danbury RoadWilton, Connecticut 06897), CHIEDA, Michael, Andrew (77 Danbury RoadWilton, Connecticut 06897), PEREZ-FALCON, Victor, Antonio (77 D...