INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CHARGING PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE-OPTICAL MODULE, METHOD OF PROJECTING A PLURALITY OF CHARGED PARTICLE BEAMS TOWARDS A SAMPLE"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082437) for "CHARGING PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE-OPTICAL MODULE, METHOD OF PROJECTING A PLURALITY OF CHARGED PARTICLE BEAMS TOWARDS A SAMPLE" on Nov 14, 2024. With publication no. WO/2025/131468, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WIELAND, Marco, Jan-Jaco (P.O Box 3245500 AH Veldhoven)

Abstract: The disclosure relates to apparatus and methods for projecting a plurality of charged p...