INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CHARGED PARTICLE-OPTICAL MODULE"

GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/055378) for "CHARGED PARTICLE-OPTICAL MODULE" on Feb 27, 2025. With publication no. WO/2025/201789, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VEENSTRA, Roy, Ramon (P.O. Box 3245500 AH Veldhoven), SMAKMAN, Erwin, Paul (P.O. Box 3245500 AH Veldhoven)

Abstract: A charged particle-optical module (200) for a plurality of charged particle-optical devices configured to direct charged particle beams along respecti...