INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CHARGED PARTICLE-OPTICAL MODULE"

GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/055800) for "CHARGED PARTICLE-OPTICAL MODULE" on Mar 04, 2025. With publication no. WO/2025/201807, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VEENSTRA, Roy, Ramon (P.O. Box 3245500 AH Veldhoven), SMAKMAN, Erwin, Paul (P.O. Box 3245500 AH Veldhoven), VAN SOEST, Jurgen (P.O. Box 3245500 AH Veldhoven)

Abstract: A charged particle-optical module 200 for a charged particle-optical device configured to direct a ...