GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/055776) for "CHARGED PARTICLE-OPTICAL MODULE" on Mar 04, 2025. With publication no. WO/2025/201803, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VEENSTRA, Roy, Ramon (P.O. Box 3245500 AH Veldhoven), SMAKMAN, Erwin, Paul (P.O. Box 3245500 AH Veldhoven)
Abstract: A charged particle-optical module for at least one charged particle-optical device configured to direct charged particle beams along respective beam p...