INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CHARGED PARTICLE-OPTICAL MODULE, CHARGED PARTICLE-OPTICAL DEVICE AND A METHOD OF USING A CHARGED-PARTICLE APPARATUS"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/083794) for "CHARGED PARTICLE-OPTICAL MODULE, CHARGED PARTICLE-OPTICAL DEVICE, AND A METHOD OF USING A CHARGED-PARTICLE APPARATUS" on Nov 27, 2024. With publication no. WO/2025/131599, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MANGNUS, Albertus, Victor, Gerardus (P.O. Box 3245500 AH Veldhoven)

Abstract: A charged particle-optical module for generating a plurality of sub-beams 211-213 from a source beam ...