GENEVA, May 5 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/079009) for "CHARGED PARTICLE-OPTICAL APPARATUS AND METHOD FOR DETECTING SIGNAL CHARGED PARTICLES" on Oct 15, 2024. With publication no. WO/2025/087733, the details related to the patent application was published on May 01, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WIELAND, Marco, Jan-Jaco (P.O. Box 3245500 AH Veldhoven)
Abstract:
The present disclosure relates to a charged particle-optical apparatus configured to direct charged particles toward a sample, the charged particl...