GENEVA, Feb. 16 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/071067) for "CHARGED PARTICLE DETECTION SYSTEM" on Jul 24, 2024. With publication no. WO/2025/031808, the details related to the patent application was published on Feb 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GOOSEN, Maikel, Robert (P.O. Box 3245500 AH Veldhoven), VAN WEPEREN, Ilse (P.O. Box 3245500 AH Veldhoven), MANGNUS, Albertus, Victor, Gerardus (P.O. Box 3245500 AH Veldhoven)
Abstract:
A charged-particle beam apparatus configured to direct a charged-particle bea...