GENEVA, March 9 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/073199) for "CARBON NANOTUBE PELLICLE MEMBRANE" on Aug 19, 2024. With publication no. WO/2025/045624, the details related to the patent application was published on Mar 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHLEGEL, Andreas (P.O. Box 3245500 AH Veldhoven), NIKIPELOV, Andrey (P.O. Box 3245500 AH Veldhoven), VERMEULEN, Paul, Alexander (P.O. Box 3245500 AH Veldhoven)
Abstract:
There is provided a carbon nanotube pellicle membrane for a lithography apparatus, the pell...