INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "CALIBRATION SUBSTRATE, METHOD TO DETERMINE AN OFFSET CORRECTION FOR A SUBSTRATE TO BE LOADED ON A SUBSTRATE SUPPORT, COMBINATION OF A SUBSTRATE SUPPORT AND A CALIBRATION SUBSTRATE AND SUBSTRATE HANDLING APPARATUS"

GENEVA, Dec. 1 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/061216) for "CALIBRATION SUBSTRATE, METHOD TO DETERMINE AN OFFSET CORRECTION FOR A SUBSTRATE TO BE LOADED ON A SUBSTRATE SUPPORT, COMBINATION OF A SUBSTRATE SUPPORT AND A CALIBRATION SUBSTRATE, AND SUBSTRATE HANDLING APPARATUS" on Apr 24, 2025. With publication no. WO/2025/242387, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): POIESZ, Thomas (P.O. Box 3245500 AH Veldhoven), PONTONI, Daniel (P.O. Box 3245500 AH V...