GENEVA, April 14 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/075258) for "BROADBAND LIGHT SOURCE ASSEMBLY" on Sep 10, 2024. With publication no. WO/2025/073435, the details related to the patent application was published on Apr 10, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KARPATE, Tanvi (PO Box 3245500 AH Veldhoven), ABDOLVAND, Amir (PO Box 3245500 AH Veldhoven), TRAVERS, John, Colin (RiccartonEH 14 4AS Edinburgh)
Abstract:
A broadband light source assembly, a metrology apparatus and a method of generating broadband radiation have...