GENEVA, July 29 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/086758) for "AUTOMATIC CORRECTION FOR HARDWARE-BASED SEM TOOL TIME OFFSET" on Dec 17, 2024. With publication no. WO/2025/153283, the details related to the patent application was published on Jul 24, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): FU, Jiyou (80 W Tasman DriveSan Jose, California 95134), WANG, Yongxin (80 W Tasman DriveSan Jose, California 95134), XIA, Zhenyang (80 W Tasman DriveSan Jose, California 95134), XIAO, Hong (80 W Tasman DriveSan Jose, California 95134)
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