GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/056343) for "APPARATUS WITH MANGIN-LIKE FACET MIRROR" on Mar 07, 2025. With publication no. WO/2025/201850, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VAN BRUG, Hedser (P.O. Box 3245500 AH Veldhoven)
Abstract: An apparatus of a Mangin mirror including a planar front surface and a back surface with a plurality of facets. A second mirror to direct a path of illumination and a detector, wherein the Mangin mirr...