GENEVA, Aug. 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/052034) for "APPARATUS FOR USE IN A METROLOGY TOOL" on Jan 28, 2025. With publication no. WO/2025/172038, the details related to the patent application was published on Aug 21, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): EURLINGS, Markus, Franciscus, Antonius (P.O. Box 3245500 AH Veldhoven), VAN VOORST, Peter, Danny (P.O. Box 3245500 AH Veldhoven), WARNAAR, Patrick (P.O. Box 3245500 AH Veldhoven), ZHOU, Zili (P.O. Box 3245500 AH Veldhoven), MATHIJSSEN, Simon, Gijsbert, Josephus...