INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "APPARATUS FOR AND METHOD OF CONTROLLING CONTAMINANT DISPERSAL IN EUV RADIATION SOURCE"

GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/057430) for "APPARATUS FOR AND METHOD OF CONTROLLING CONTAMINANT DISPERSAL IN EUV RADIATION SOURCE" on Mar 18, 2025. With publication no. WO/2025/201973, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): EASO, Liza (17075 Thornmint CourtSan Diego, California 92127), MANDRUSIAK, Gary, Dwayne (17075 Thornmint CourtSan Diego, California 92127), STEWART, John, Tom (17075 Thornmint CourtSan Diego, California 92127), LAN...