INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "AN OPTICAL FILTER, A HETERODYNE INTERFEROMETER SYSTEM COMPRISING THE FILTER AND A METHOD FOR FILTERING AN INPUT BEAM FOR A HETERODYNE INTERFEROMETER"

GENEVA, March 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/071798) for "AN OPTICAL FILTER, A HETERODYNE INTERFEROMETER SYSTEM COMPRISING THE FILTER, AND A METHOD FOR FILTERING AN INPUT BEAM FOR A HETERODYNE INTERFEROMETER" on Aug 01, 2024. With publication no. WO/2025/056241, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KWEE, Patrick (P.O. Box 3245500 AH Veldhoven)

Abstract: A heterodyne interferometer system comprises: a first light source providing a first lase...