GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/055869) for "AN ELECTROSTATIC CLAMP" on Mar 04, 2025. With publication no. WO/2025/201814, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): EGGELS, Eva, Hanna (P.O. Box 3245500 AH Veldhoven), BERGHOUT, Pieter (P.O. Box 3245500 AH Veldhoven)
Abstract: An electrostatic clamp for clamping a substrate (e.g. a silicon wafer) comprises: a body; at least one central electrode; and at least one peripheral electrode. The ...