INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "ACTUATOR AND LITHOGRAPHIC, SUBSTRATE INSPECTION OR WAFER METROLOGY APPARATUS"

GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/056918) for "ACTUATOR AND LITHOGRAPHIC, SUBSTRATE INSPECTION OR WAFER METROLOGY APPARATUS" on Mar 13, 2025. With publication no. WO/2025/201906, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BASTIAENS, Koen (P.O. Box 3245500 AH Veldhoven)

Abstract: An actuator comprises a coil and a magnet arrangement. The coil is arranged in a plane defined by first and second directions, wherein main coil portions of the coi...