INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "A METHOD OF REFURBISHING A SUBSTRATE SUPPORT"

GENEVA, April 14 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/075177) for "A METHOD OF REFURBISHING A SUBSTRATE SUPPORT" on Sep 10, 2024. With publication no. WO/2025/073433, the details related to the patent application was published on Apr 10, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KEMPEN, Antonius, Theodorus, Wilhelmus (P.O. Box 3245500 AH Veldhoven), BALDUS, Oliver (Waldkraiburger StraBe 512347 Berlin)

Abstract: A method of refurbishing a substrate support, the substrate support comprising: a first surface, configured to supp...