INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "A METHOD OF LITHOGRAPHY AND ASSOCIATED APPARATUSES"

GENEVA, Oct. 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/056221) for "A METHOD OF LITHOGRAPHY AND ASSOCIATED APPARATUSES" on Mar 07, 2025. With publication no. WO/2025/214673, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BRINKHOF, Ralph (P.O. Box 3245500 AH Veldhoven), LAMBREGTS, Cornelis, Johannes, Henricus (P.O. Box 3245500 AH Veldhoven), WERKMAN, Roy (P.O. Box 3245500 AH Veldhoven)

Abstract: Disclosed is method of determining an actuatable correction for a lith...