INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "A MEASUREMENT SYSTEM AND A DIFFRACTION GRATING THEREFOR"

GENEVA, April 6 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/072792) for "A MEASUREMENT SYSTEM AND A DIFFRACTION GRATING THEREFOR" on Aug 13, 2024. With publication no. WO/2025/067757, the details related to the patent application was published on Apr 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DIKKEN, Dirk Jan, Willem (P.O. Box 3245500 AH Veldhoven), CHONG, Derick, Yun, Chek (P.O. Box 3245500 AH Veldhoven)

Abstract: A measurement system (shearing interferometer) is for determining an aberration map for a projection system (for ex...