INTERNATIONAL PATENT: ASML NETHERLANDS B.V., Q.ANT GMBH FILES APPLICATION FOR "PROCESSES AND SYSTEMS FOR DROPLET DETECTION IN AN EUV LIGHT SOURCE"

GENEVA, Nov. 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven), Q.ANT GMBH (HandwerkstraBe 2970565 Stuttgart) filed a patent application (PCT/EP2025/062031) for "PROCESSES AND SYSTEMS FOR DROPLET DETECTION IN AN EUV LIGHT SOURCE" on May 01, 2025. With publication no. WO/2025/237695, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HUANG, Eric (17075 Thornmint CourtSan Diego, California 92127), FARR, Erik, Peter (17075 Thornmint CourtSan Diego, California 92127), SCHAFGANS, Alexander, Anthony (17075 Thornmint Cour...