INTERNATIONAL PATENT: ASML NETHERLANDS B.V., CYMER, LLC FILES APPLICATION FOR "DUAL COMB RADIATION SOURCE AND HETERODYNE DETECTION FOR OVERLAY METROLOGY SYSTEMS AND METHODS"

GENEVA, Dec. 8 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven), CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/EP2025/062799) for "DUAL COMB RADIATION SOURCE AND HETERODYNE DETECTION FOR OVERLAY METROLOGY SYSTEMS AND METHODS" on May 09, 2025. With publication no. WO/2025/247616, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JAHANI, Saman (77 Danbury RoadWilton, Connecticut 06897), REZVANI NARAGHI, Roxana (77 Danbury RoadWilton, Connecticut 06897), LIU, Mingchen (17...