GENEVA, Feb. 16 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven), CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/068148) for "METHOD FOR OPTICAL CALIBRATION" on Jun 27, 2024. With publication no. WO/2025/031666, the details related to the patent application was published on Feb 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GOUDZWAARD, Maurits (P.O. Box 3245500 AH Veldhoven)
Abstract:
A method of calibrating an illumination system for a lithographic system, the method comprising: applying a known misalignment to the illumina...