GENEVA, Nov. 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven), CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/060469) for "METHOD FOR CALIBRATING ILLUMINATION OPTICS" on Apr 16, 2025. With publication no. WO/2025/242365, the details related to the patent application was published on Nov 27, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GOUDZWAARD, Maurits (P.O. Box 3245500 AH Veldhoven), BAUMER, Florian (Rudolf-Eber-Strasse 273447 Oberkochen), STEEGHS, Marco, Matheus, Louis (P.O. Box 3245500 AH Veldhoven), HARTGERS, Albertus (P...