INTERNATIONAL PATENT: ASML NETHERLANDS B.V., CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR CALIBRATING AN OPTICAL MEASUREMENT SYSTEM AND SYSTEM ADAPTED TO IMPLEMENT THE METHOD"

GENEVA, Dec. 8 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven), CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/062568) for "METHOD FOR CALIBRATING AN OPTICAL MEASUREMENT SYSTEM AND SYSTEM ADAPTED TO IMPLEMENT THE METHOD" on May 08, 2025. With publication no. WO/2025/247607, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LILIENFEIN, Nikolai, Maria (Rudolf-Eber-StraBe 273447 Oberkochen), VALENTIN, Christiaan, Louis (P.O. Box 3245500 AH Veldhoven), HELLER, Pascal ...