INTERNATIONAL PATENT: ASML NETHERLANDS B.V., CARL ZEISS SMT GMBH FILES APPLICATION FOR "IMPROVEMENTS TO LITHOGRAPHIC METHODS AND APPARATUS"

GENEVA, Nov. 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven), CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/060222) for "IMPROVEMENTS TO LITHOGRAPHIC METHODS AND APPARATUS" on Apr 14, 2025. With publication no. WO/2025/242362, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HO, Vinh, Huu (P.O. Box 3245500 AH Veldhoven), LEUERMANN, Martin (Rudolf-Eber-Strasse 273447 Oberkochen), GRUNER, Toralf (Rudolf-Eber-Strasse 273447 Oberkochen), STINSTRA, Erwin, Diederik...