INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "UNDERLAYER WITH FLUORINE FOR EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY"

GENEVA, Dec. 31 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, CA 95054) filed a patent application (PCT/US2025/032910) for "UNDERLAYER WITH FLUORINE FOR EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY" on Jun 09, 2025. With publication no. WO/2025/264425, the details related to the patent application was published on Dec 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FUNG, Nancy (1140 E. Arques Ave.Sunnyvale, CA 94085), GAO, Larry (43041 Mayfair Park Ter.Fremont, CA 94538), WANG, Likun (1140 E. Arques AvenueSunnyvale, CA 94085), KANZAWA, Hideyuki (141 Fuller Rd.Albany, NY 12203), LIU...