INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR REDUCING IRREGULARITIES WITHIN A PLASMA-BASED PROCESSING CHAMBER"

GENEVA, May 28 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2024/055770) for "SYSTEMS AND METHODS FOR REDUCING IRREGULARITIES WITHIN A PLASMA-BASED PROCESSING CHAMBER" on Nov 13, 2024. With publication no. WO/2025/106571, the details related to the patent application was published on May 22, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Sheng Yi (3050 Bowers AvenueSanta Clara, California 95054), CHANG, Fu Ting (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: A processing chamber for performing a plasma-ba...