INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "SUBSTRATE SUPPORT ASSEMBLY WITH IMPROVED THERMAL UNIFORMITY"

GENEVA, March 18 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2024/044512) for "SUBSTRATE SUPPORT ASSEMBLY WITH IMPROVED THERMAL UNIFORMITY" on Aug 29, 2024. With publication no. WO/2025/054078, the details related to the patent application was published on Mar 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PARKHE, Vijay D. (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: Methods for improving thermal uniformity on a surface of a substrate support assembly. One method includes temporarily clamping a ceramic ...