GENEVA, May 28 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2024/055776) for "PROCESSING CHAMBER WITH A ROTATABLE PEDESTAL HUB" on Nov 13, 2024. With publication no. WO/2025/106577, the details related to the patent application was published on May 22, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PARKHE, Vijay D. (3050 Bowers AvenueSanta Clara, California 95054)
Abstract:
A processing chamber includes a pedestal hub including a plurality of arms each extending in a different direction. The pedestal hub is rotatable about...