INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "NF3 ULTRA LOW FLOW"

GENEVA, July 30 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/011992) for "NF3 ULTRA LOW FLOW" on Jan 17, 2025. With publication no. WO/2025/155797, the details related to the patent application was published on Jul 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): INGLE, Nitin K. (3050 Bowers AvenueSanta Clara, California 95054), PAKULSKI, Ryan (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: A system of semiconductor manufacturing may include a gas canister may including a gas mix with NF3 in a range of a...