INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT"

GENEVA, June 4 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2024/056339) for "MULTIZONE COATED VACUUM CHUCK FOR IR MEASUREMENT" on Nov 18, 2024. With publication no. WO/2025/111217, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BHAT, Sanjay (#02-03/04, 10 Science Park RoadThe Alpha Science Park IISingapore 117684)

Abstract: Embodiments of chuck plates for a substrate support are provided herein. In some embodiments, the chuck plate includes an upper su...