INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "METHOD AND APPARATUS FOR MITIGATING HEAT TRANSFER IN HIGH TEMPERATURE PROCESSES"

GENEVA, June 12 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2024/056549) for "METHOD AND APPARATUS FOR MITIGATING HEAT TRANSFER IN HIGH TEMPERATURE PROCESSES" on Nov 19, 2024. With publication no. WO/2025/117259, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PARKHE, Vijay D. (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: A substrate support assembly including a chuck including one or more plates, a cooling plate or facilities plate attach...