INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "MAGNETIC LEVITATION SYSTEM FOR SUBSTRATE SUPPORT DEVICE"

GENEVA, Aug. 6 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/012794) for "MAGNETIC LEVITATION SYSTEM FOR SUBSTRATE SUPPORT DEVICE" on Jan 23, 2025. With publication no. WO/2025/160296, the details related to the patent application was published on Jul 31, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AUST, Henning (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: A substrate support device is provided. The substrate support device includes a base secured to a processing chamber. The base includes a stator co...