INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "LASER CLEANING USED COMPONENT OF SUBSTRATE PROCESSING CHAMBER"

GENEVA, March 18 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, CA 95054) filed a patent application (PCT/US2024/043949) for "LASER CLEANING USED COMPONENT OF SUBSTRATE PROCESSING CHAMBER" on Aug 27, 2024. With publication no. WO/2025/054036, the details related to the patent application was published on Mar 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YIN, Chunrong (3320 Scott BlvdSanta Clara, CA 95054), WANG, Ching-Pao (5F., No. 5, Gongye E. 7th RdHsinchu Science ParkHsinchu 300093), LIU, Joseph (5F., No. 5, Gongye E. 7th RdEast Dist.Hsinchu City 300), LIN, Yixing (3050 ...