GENEVA, July 21 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/011249) for "IN-SITU ANALYSIS OF METAL SPECIES FOR PROCESSING CHAMBERS" on Jan 10, 2025. With publication no. WO/2025/151825, the details related to the patent application was published on Jul 17, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WANG, Jiansheng (3050 Bowers AvenueSanta Clara, California 95054)
Abstract:
Systems and methods are provided for analysis of metal contaminants within a processing chamber. Such systems and methods can include a vacuum...