GENEVA, March 18 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2024/012379) for "HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS" on Jan 22, 2024. With publication no. WO/2025/053868, the details related to the patent application was published on Mar 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): CHADHA, Arvinder Manmohan Singh (3050 Bowers AvenueSanta Clara, California 95054)
Abstract:
A method includes: identifying property data associated with a substrate support system; identifying target performance data asso...