INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "ELECTROSTATIC CHUCK WITH PERFORATED OR SCREENED CHUCKING ELECTRODE"

GENEVA, Oct. 15 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/023015) for "ELECTROSTATIC CHUCK WITH PERFORATED OR SCREENED CHUCKING ELECTRODE" on Apr 03, 2025. With publication no. WO/2025/212929, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHADHA, Arvinder ManmohanSingh (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: An electrostatic chuck includes a ceramic puck including a plurality of mesas configured to support a substrate. The ele...